Synthesis and characterization of self-assembled ZnO nano-dots grown on SiNx/Si(001) substrates by radio frequency magnetron sputtering

Title
Synthesis and characterization of self-assembled ZnO nano-dots grown on SiNx/Si(001) substrates by radio frequency magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 22, Pages 6522-6525
Publisher
Elsevier BV
Online
2010-02-11
DOI
10.1016/j.tsf.2010.01.047

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