Journal
THIN SOLID FILMS
Volume 518, Issue 22, Pages 6492-6495Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2010.01.057
Keywords
Inductively-coupled plasma; Low-inductance antenna; Polymer; Low-damage process; X-ray photoelectron spectroscopy
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Plasma-polymer interactions have been investigated using atomic force microscopy (AFM) and x-ray photoelectron spectroscopy (XPS) of polyethyleneterephthalate (PET) films, which have been exposed to argon plasmas driven by low-inductance antenna modules as a parameter of ion energy. The AFM images indicated that the argon plasma exposure exhibited a significant change in surface roughness. The XPS analyses suggested that the degradation of chemical bonding structure and/or bond scission of PET could be effectively suppressed in the plasma exposures with ion energies below 6 eV. However, significant degradations of O=C-O bond, C-O bond and phenyl group were observed with increasing ion energy above 6 eV. (C) 2010 Elsevier B.V. All rights reserved.
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