Tensile strain engineering of Si thin films using porous Si substrates

Published 2009 View Full Article

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Title
Tensile strain engineering of Si thin films using porous Si substrates
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 9, Pages 2466-2469
Publisher
Elsevier BV
Online
2009-10-15
DOI
10.1016/j.tsf.2009.09.161

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