Low friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique

Published 2010 View Full Article

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Title
Low friction CrN/TiN multilayer coatings prepared by a hybrid high power impulse magnetron sputtering/DC magnetron sputtering deposition technique
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 19, Pages 5553-5557
Publisher
Elsevier BV
Online
2010-06-01
DOI
10.1016/j.tsf.2010.05.061

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