Enhanced conductivity of aluminum doped ZnO films by hydrogen plasma treatment

Published 2010 View Full Article

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Title
Enhanced conductivity of aluminum doped ZnO films by hydrogen plasma treatment
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 24, Pages 7445-7449
Publisher
Elsevier BV
Online
2010-05-11
DOI
10.1016/j.tsf.2010.05.020

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