Structural characterization of sputtered indium oxide films deposited at room temperature

Title
Structural characterization of sputtered indium oxide films deposited at room temperature
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 16, Pages 4508-4511
Publisher
Elsevier BV
Online
2009-12-17
DOI
10.1016/j.tsf.2009.12.018

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