CrN/AlN superlattice coatings synthesized by pulsed closed field unbalanced magnetron sputtering with different CrN layer thicknesses

Published 2009 View Full Article

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Title
CrN/AlN superlattice coatings synthesized by pulsed closed field unbalanced magnetron sputtering with different CrN layer thicknesses
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 20, Pages 5798-5804
Publisher
Elsevier BV
Online
2009-03-10
DOI
10.1016/j.tsf.2009.02.136

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