Interface roughness effect between gate oxide and metal gate on dielectric property

Title
Interface roughness effect between gate oxide and metal gate on dielectric property
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 14, Pages 3892-3895
Publisher
Elsevier BV
Online
2009-02-10
DOI
10.1016/j.tsf.2009.01.117

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