Humidity sensor structures with thin film porous alumina for on-chip integration

Published 2009 View Full Article

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Title
Humidity sensor structures with thin film porous alumina for on-chip integration
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 22, Pages 6198-6201
Publisher
Elsevier BV
Online
2009-04-08
DOI
10.1016/j.tsf.2009.04.010

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