A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

Published 2009 View Full Article

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Title
A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 1, Pages 247-256
Publisher
Elsevier BV
Online
2009-07-26
DOI
10.1016/j.tsf.2009.07.143

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