High density plasma treatment of polyimide substrate to improve structural and electrical properties of Ga-doped ZnO films

Published 2009 View Full Article

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Title
High density plasma treatment of polyimide substrate to improve structural and electrical properties of Ga-doped ZnO films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 23, Pages 6298-6300
Publisher
Elsevier BV
Online
2009-02-27
DOI
10.1016/j.tsf.2009.02.112

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