Substrate current enhancement in 65 nm metal-oxide-silicon field-effect transistor under external mechanical stress

Published 2008 View Full Article

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Title
Substrate current enhancement in 65 nm metal-oxide-silicon field-effect transistor under external mechanical stress
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 5, Pages 1715-1718
Publisher
Elsevier BV
Online
2008-09-16
DOI
10.1016/j.tsf.2008.09.031

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