X-ray photoelectron spectroscopy analyses of titanium oxynitride films prepared by magnetron sputtering using air/Ar mixtures

Title
X-ray photoelectron spectroscopy analyses of titanium oxynitride films prepared by magnetron sputtering using air/Ar mixtures
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 17, Pages 5006-5009
Publisher
Elsevier BV
Online
2009-03-23
DOI
10.1016/j.tsf.2009.03.100

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