Surface modification of high aspect ratio structures with fluoropolymer coatings using chemical vapor deposition

Initiated chemical vapor deposition (iCVD) was used to coat the internal surfaces of high aspect ratio capillary pore membranes and silicon trenches with poly(1H,1H,2H,2H-perfluorodecyl acrylate) (PPFDA). The presence of the fluoropolymer coating along the pore walls of the membranes was confirmed using X-ray photoelectron microscopy, electron microprobe analysis, and contact angle measurements. The results of this study demonstrate that the iCVD process can be used to conformally coat high aspect ratio microstructures (up to 80:1) with organic polymers. (C) 2009 Elsevier B.V. All rights reserved.