Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units

Published 2009 View Full Article

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Title
Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 3, Pages 1006-1011
Publisher
Elsevier BV
Online
2009-08-01
DOI
10.1016/j.tsf.2009.07.161

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