Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films

Published 2009 View Full Article

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Title
Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 14, Pages 3900-3903
Publisher
Elsevier BV
Online
2009-02-08
DOI
10.1016/j.tsf.2009.01.159

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