Fabrication of high-speed polyimide-based humidity sensor using anisotropic and isotropic etching with ICP

Published 2009 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Fabrication of high-speed polyimide-based humidity sensor using anisotropic and isotropic etching with ICP
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 14, Pages 3879-3882
Publisher
Elsevier BV
Online
2009-02-05
DOI
10.1016/j.tsf.2009.01.129

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.