The assessment of the fracture behavior in spin-on organosilicates by nanoindentation and nanoscratch tests

Published 2008 View Full Article

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Title
The assessment of the fracture behavior in spin-on organosilicates by nanoindentation and nanoscratch tests
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 11, Pages 3216-3221
Publisher
Elsevier BV
Online
2008-11-13
DOI
10.1016/j.tsf.2008.10.141

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