Deposition of ZnO thin films on SiO2/Si substrate with Al2O3 buffer layer by radio frequency magnetron sputtering for high frequency surface acoustic wave devices

Published 2008 View Full Article

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Journal

THIN SOLID FILMS

Volume 517, Issue 11, Pages 3378-3381

Publisher

Elsevier BV

Online

2008-12-14

DOI

10.1016/j.tsf.2008.12.008

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THIN SOLID FILMS

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