Initial reaction mechanism of nitrogen-doped zinc oxide with atomic layer deposition

Published 2009 View Full Article

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Title
Initial reaction mechanism of nitrogen-doped zinc oxide with atomic layer deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 15, Pages 4355-4359
Publisher
Elsevier BV
Online
2009-03-14
DOI
10.1016/j.tsf.2009.03.014

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