Control of molybdenum disulfide basal plane orientation during coating growth in pulsed magnetron sputtering discharges

Published 2009 View Full Article

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Title
Control of molybdenum disulfide basal plane orientation during coating growth in pulsed magnetron sputtering discharges
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 19, Pages 5605-5610
Publisher
Elsevier BV
Online
2009-02-14
DOI
10.1016/j.tsf.2009.01.190

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