Process development of ITO source/drain electrode for the top-gate indium–gallium–zinc oxide transparent thin-film transistor

Published 2009 View Full Article

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Title
Process development of ITO source/drain electrode for the top-gate indium–gallium–zinc oxide transparent thin-film transistor
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 14, Pages 4094-4099
Publisher
Elsevier BV
Online
2009-02-18
DOI
10.1016/j.tsf.2009.01.181

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