Stability of indium-oxide thin-film transistors by reactive ion beam assisted deposition

Title
Stability of indium-oxide thin-film transistors by reactive ion beam assisted deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 23, Pages 6341-6344
Publisher
Elsevier BV
Online
2009-02-27
DOI
10.1016/j.tsf.2009.02.108

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