Optimization of sputtered Cr/Au thin film for diaphragm-based MEMS applications

Published 2009 View Full Article

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Title
Optimization of sputtered Cr/Au thin film for diaphragm-based MEMS applications
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 17, Pages 4921-4925
Publisher
Elsevier BV
Online
2009-03-26
DOI
10.1016/j.tsf.2009.03.151

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