Protection of polymer from atomic-oxygen erosion using Al2O3 atomic layer deposition coatings

Published 2007 View Full Article

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Title
Protection of polymer from atomic-oxygen erosion using Al2O3 atomic layer deposition coatings
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 12, Pages 4036-4039
Publisher
Elsevier BV
Online
2007-07-22
DOI
10.1016/j.tsf.2007.07.150

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