Effects of amino-terminated self-assembled monolayers on nucleation and growth of chemical vapor-deposited copper films

Title
Effects of amino-terminated self-assembled monolayers on nucleation and growth of chemical vapor-deposited copper films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 2, Pages 635-640
Publisher
Elsevier BV
Online
2008-07-30
DOI
10.1016/j.tsf.2008.07.030

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