Bias effect on microstructure and mechanical properties of magnetron sputtered nanocrystalline titanium carbide thin films

Published 2007 View Full Article

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Title
Bias effect on microstructure and mechanical properties of magnetron sputtered nanocrystalline titanium carbide thin films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 16, Pages 5419-5423
Publisher
Elsevier BV
Online
2007-07-14
DOI
10.1016/j.tsf.2007.07.022

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