Morphology, electrical and optical properties of undoped ZnO layers deposited on silicon substrates by PEMOCVD

Published 2007 View Full Article

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Title
Morphology, electrical and optical properties of undoped ZnO layers deposited on silicon substrates by PEMOCVD
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 7, Pages 1396-1400
Publisher
Elsevier BV
Online
2007-04-02
DOI
10.1016/j.tsf.2007.03.064

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