Growth and structural characterization of cerium oxide thin films realized on Si(111) substrates by on-axis r.f. magnetron sputtering

Published 2008 View Full Article

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Title
Growth and structural characterization of cerium oxide thin films realized on Si(111) substrates by on-axis r.f. magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 1, Pages 450-452
Publisher
Elsevier BV
Online
2008-08-15
DOI
10.1016/j.tsf.2008.08.059

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