Preparation of α-alumina-g-polyacrylamide composite abrasive and chemical mechanical polishing behavior

Published 2007 View Full Article

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Title
Preparation of α-alumina-g-polyacrylamide composite abrasive and chemical mechanical polishing behavior
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 10, Pages 3005-3008
Publisher
Elsevier BV
Online
2007-11-27
DOI
10.1016/j.tsf.2007.11.050

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