Low temperature metal oxide film deposition and reaction kinetics in supercritical carbon dioxide

Title
Low temperature metal oxide film deposition and reaction kinetics in supercritical carbon dioxide
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 15, Pages 4997-5003
Publisher
Elsevier BV
Online
2007-12-04
DOI
10.1016/j.tsf.2007.10.057

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