Thermomechanical properties and mechanical stresses of Ge2Sb2Te5 films in phase-change random access memory

Published 2008 View Full Article

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Title
Thermomechanical properties and mechanical stresses of Ge2Sb2Te5 films in phase-change random access memory
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 2, Pages 848-852
Publisher
Elsevier BV
Online
2008-09-14
DOI
10.1016/j.tsf.2008.08.194

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