Influence of residual water on magnetron sputter deposited crystalline Al2O3 thin films

Published 2007 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Influence of residual water on magnetron sputter deposited crystalline Al2O3 thin films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 12, Pages 3877-3883
Publisher
Elsevier BV
Online
2007-07-17
DOI
10.1016/j.tsf.2007.07.135

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.