Effect of high temperature annealing on the electrical performance of titanium/platinum thin films

Published 2007 View Full Article

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Title
Effect of high temperature annealing on the electrical performance of titanium/platinum thin films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 6, Pages 898-906
Publisher
Elsevier BV
Online
2007-05-02
DOI
10.1016/j.tsf.2007.04.128

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