Eliminating carbon contamination on oxidized Si surfaces using a VUV excimer lamp

Published 2008 View Full Article

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Title
Eliminating carbon contamination on oxidized Si surfaces using a VUV excimer lamp
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 3, Pages 1011-1015
Publisher
Elsevier BV
Online
2008-06-21
DOI
10.1016/j.tsf.2008.06.046

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