Journal
THIN SOLID FILMS
Volume 516, Issue 7, Pages 1386-1390Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2007.05.027
Keywords
tin oxide (SnO2); transparent conducting oxide (TCO); sputtering; oxygen gas ratio
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Antimony doped tin oxide (SnO2:Sb) films have been prepared by d.c. magnetron sputtering and the properties of the films depend on deposition conditions, such as O-2 gas ratio, were investigated. The gas composition was found to affect the properties of the films. With the incorporation additional oxygen, the electrical and optical properties of films significantly improved. The minimum value of resistivity of the films was 4.9 x 10(-3) Omega cm at the oxygen concentration of 30% and the optical transmittance was over 80%. (c) 2007 Elsevier B.V. All rights reserved.
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