Epitaxial growth of high-κ oxides on silicon

Published 2008 View Full Article

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Title
Epitaxial growth of high-κ oxides on silicon
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 1, Pages 197-200
Publisher
Elsevier BV
Online
2008-08-28
DOI
10.1016/j.tsf.2008.08.165

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