Characterization of anisotropic relaxation rate of SGOI (110) substrates

Title
Characterization of anisotropic relaxation rate of SGOI (110) substrates
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 1, Pages 285-288
Publisher
Elsevier BV
Online
2008-08-16
DOI
10.1016/j.tsf.2008.08.024

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