Journal
THIN SOLID FILMS
Volume 517, Issue 2, Pages 933-936Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2008.06.090
Keywords
Thermal conductivity; Differential 3-omega method; Multilayer thin film; Heat spreading effect; Apparent thermal conductivity
Categories
Funding
- Korea Science and Engineering Foundation (KOSEF) through Center for Information Storage Devices (CISD)
- Seoul metropolitan government through Seoul Science Fellowship program
- National Research Foundation of Korea [과C6A1805] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Ask authors/readers for more resources
We present an intrinsic error in differential 3-omega measurement method due to two-dimensional heat spreading effect in the upper layer of the target film. By measuring thermal conductivities of 300 nm PECVD-grown silicon dioxide thin films with various thicknesses of upper layers, significant heat spreading effect is observed. Also, analytical modeling regarding apparent thin film thermal conductivity is conducted for verification of experimental results. Experimental results as well as analytical results show that the measurement error tends to increase with thickness of upper layer due to two-dimensional heat spreading effect. (C) 2008 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available
Share Paper
