Atmospheric plasma discharge chemical vapor deposition of SnOx thin films using various tin precursors

Title
Atmospheric plasma discharge chemical vapor deposition of SnOx thin films using various tin precursors
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 15, Pages 4720-4727
Publisher
Elsevier BV
Online
2007-08-24
DOI
10.1016/j.tsf.2007.08.074

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