Characteristics of monopole antenna plasmas for TEOS PECVD

Published 2007 View Full Article

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Title
Characteristics of monopole antenna plasmas for TEOS PECVD
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 11, Pages 3605-3609
Publisher
Elsevier BV
Online
2007-08-17
DOI
10.1016/j.tsf.2007.08.029

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