Surface treatment of polycarbonate and polyethersulphone for SiNx thin film deposition

Title
Surface treatment of polycarbonate and polyethersulphone for SiNx thin film deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 7, Pages 1405-1409
Publisher
Elsevier BV
Online
2007-08-03
DOI
10.1016/j.tsf.2007.07.176

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