Crystallization of amorphous indium zinc oxide thin films produced by radio-frequency magnetron sputtering

Published 2007 View Full Article

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Title
Crystallization of amorphous indium zinc oxide thin films produced by radio-frequency magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 7, Pages 1374-1376
Publisher
Elsevier BV
Online
2007-04-02
DOI
10.1016/j.tsf.2007.03.087

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