Combinatorial initiated chemical vapor deposition (iCVD) for polymer thin film discovery

Published 2007 View Full Article

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Title
Combinatorial initiated chemical vapor deposition (iCVD) for polymer thin film discovery
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 5, Pages 681-683
Publisher
Elsevier BV
Online
2007-06-19
DOI
10.1016/j.tsf.2007.06.113

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