Step coverage study of indium-tin-oxide thin films by spray CVD on non-flat substrates at different temperatures

Title
Step coverage study of indium-tin-oxide thin films by spray CVD on non-flat substrates at different temperatures
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 17, Pages 5864-5867
Publisher
Elsevier BV
Online
2007-11-20
DOI
10.1016/j.tsf.2007.10.040

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