Superconducting niobium nitride films deposited by unbalanced magnetron sputtering

Title
Superconducting niobium nitride films deposited by unbalanced magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 23, Pages 8768-8773
Publisher
Elsevier BV
Online
2008-06-26
DOI
10.1016/j.tsf.2008.06.065

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