4.4 Article

Highly oriented GaN films grown on ZnO buffer layer over quartz substrates by reactive sputtering of GaAs target

Journal

THIN SOLID FILMS
Volume 517, Issue 2, Pages 488-493

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2008.06.085

Keywords

Gallium nitride (GaN); Reactive sputtering; ZnO buffer layer; Microstructure; X-ray diffraction

Funding

  1. Board of Research in Nuclear Sciences, Department of Atomic Energy (GoI)

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Polycrystalline GaN films were deposited on quartz and ZnO buffer layers over quartz by reactive sputtering of a GaAs target in 100% nitrogen at 550 degrees C and 700 degrees C. Micro-structural investigations of the films were carried out using high resolution X-ray diffraction, atomic force microscopy and Raman spectroscopy. GaN films deposited on ZnO buffer layers exhibit strongly preferred (0002) orientation of crystallites. In particular, the film deposited at 700 degrees C on ZnO buffer layer over amorphous quartz substrate showed large crystallite size, both along and perpendicular to growth direction, strong and nearly complete c-axis orientation of crystallites with tilt of similar to 2.5 degrees and low value of micro-strain similar to 2x10(-3). The significant improvement in crystallinity and orientation of crystallites in the GaN film is attributed to the presence of the ZnO buffer layer on quartz substrate and its small lattice mismatch (1.8%) with GaN. (c) 2008 Elsevier B.V. All rights reserved.

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