Fabrication of PTFE thin films by dual catalytic chemical vapor deposition method

Title
Fabrication of PTFE thin films by dual catalytic chemical vapor deposition method
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 5, Pages 687-690
Publisher
Elsevier BV
Online
2007-07-11
DOI
10.1016/j.tsf.2007.06.185

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