Nonequilibrium situations in a pulse-modulated Ar–H2 inductively coupled thermal plasma for hydrogen doping

Published 2007 View Full Article

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Title
Nonequilibrium situations in a pulse-modulated Ar–H2 inductively coupled thermal plasma for hydrogen doping
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 13, Pages 4407-4414
Publisher
Elsevier BV
Online
2007-11-09
DOI
10.1016/j.tsf.2007.10.065

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