Structural-phase and stressed state of vacuum-arc-deposited nanostructural Mo-N coatings controlled by substrate bias during deposition

Published 2012 View Full Article

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Title
Structural-phase and stressed state of vacuum-arc-deposited nanostructural Mo-N coatings controlled by substrate bias during deposition
Authors
Keywords
-
Journal
TECHNICAL PHYSICS LETTERS
Volume 38, Issue 2, Pages 168-171
Publisher
Pleiades Publishing Ltd
Online
2012-03-14
DOI
10.1134/s1063785012020307

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